The “National Medium and Long-Term Plan for Scientific and Technological Development (2006-2020)”, while identifying a group of priority themes in key areas, focused on national goals, further highlighted the key points, and selected a number of major strategic products, key generic technologies or major projects as Major projects, and strive to achieve a breakthrough, and strive to achieve a leap-forward development of productivity through the partial leap in the development of science and technology.
'Extreme integrated circuit manufacturing equipment and complete sets of processes' special project (02 special project) 'The research of EUV photoresist materials and laboratory detection technology' by Institute of Chemistry, Chinese Academy of Sciences, Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing Kehua Micro Electronic Materials Co., Ltd. jointly undertakes. Through the efforts of all members of the project team, we completed the design, preparation and synthesis of key materials for EUV photoresist, formula composition and photoresist preparation, and preliminary evaluation of the performance of the photoresist in the laboratory. The R&D of equipment has met the assessment criteria for materials and equipment specified in the mission book. The project has applied for 15 invention patents (including 5 international patents). Up till now, a total of 10 granted patents have been granted (including 3 international patent grants). ); Trained 9 doctoral students and 1 master student.
Experts at the meeting gave full affirmation to the R&D results achieved by the project and pointed out that the development of the EUV photoresist has a strategic vision. After several years of hard work, the project team members successfully completed the research and development tasks and achieved the requirements specified in the project mission statement. Indicators; Established a research and development team in the field of high-grade photoresist, and provided personnel support for the stable development of China's semiconductor integrated circuit industry.
Subject responsible unit The responsible person of the Institute of Physics and Chemistry of the Chinese Academy of Sciences and the responsible person of the project responsible unit of the Chinese Academy of Sciences Chemical Institute expressed his sincere gratitude to the expert group for their support to the R&D team for many years. The research and development of high-grade electronic chemicals in China is in rapid development. During the period, the completion of the project will provide an important guarantee for the stable development of China's semiconductor industry, and hope to provide continuous support for the research and development of high-grade resists; encourage the R&D team to continue its efforts to exert its advantages in the design and preparation of special materials in the field. The development of the semiconductor industry makes its own contribution.
Major responsible offices of the Ministry of Science and Technology, Beijing Municipal Economic and Information Commission, 02 major special offices, 02 major special group and 02 major special office, task acceptance experts and financial acceptance experts and other relevant units participated in this Acceptance meeting.