SMIC spent 120 million U.S. dollars to buy an EUV EUV lithography machine from ASML in the Netherlands. It can be used to produce 7nm process chips in the future. Yangtze River Storage also ushered in its own first lithography machine, also from ASML, but It is a 193nm immersed type, used to produce 20-14nm process 3D NAND flash memory wafer, a $ 72,000,000 one.
According to a report on Weibo, on the morning of May 21st, in the southern district of Kangqiao Industrial Park, Pudong New Area, Shanghai, a 12-inch advanced production line construction project was built and operated by Shanghai Huali IC Manufacturing Co., Ltd. under the Hua Hong Group ('Huahong Sixth Factory' ' ) Realize the first process equipment lithography machine moved in.
The model of the lithography machine is NXT 1980Di, which is still provided by Dutch ASML. The latter official shows that This is a 193nm dual-level immersion lithography machine for 10nm (14~20nm) wafer production. It is also the most advanced immersion lithography equipment in mainland China.
According to the Huali Microelectronics official website, Huahong No. 6 Plant is the company's second 12-inch wafer production line, with a monthly production capacity of 40,000 units. Process technology starts at 28nm. Ultimately will have high-performance chip production capacity of 14nm measurements.
In addition, according to CCID Consulting's statistics, according to sales, Shanghai Huahong ranked fifth in the domestic top ten integrated circuit manufacturing companies in 2017.
