Returning Sea Team Makes Forced Breakthrough in Key Equipment Technology
On March 28th, at Shenyang Tuojing Technology Co., Ltd., located in the new factory area of No. 900 Shuijia Family, Minnan District, entered the company's ultra-clean work area, and technicians wearing protective clothing are using special chemical methods on the surface of silicon wafers. One layer of solid film is deposited. One of Tuojing's core products, PECVD (plasma-chemical vapor deposition equipment), is one of the key equipments in the chip manufacturing production line. It was previously monopolized by a few developed countries. Under the leadership of experts such as Jiang Qian, Tuojing realized the first equipment application in just five years and became the only PECVD equipment supplier in the domestic IC field.
Under the guidance of Jiang Qian, Tuojing Technology has continued to maintain rapid development since last year. The 12-inch PECVD equipment of its 11th five-year major special product has exceeded 1 million in volume production at Beijing SMIC, marking China's independent R&D. The excellent performance of the thin-film equipment on-line can replace imported equipment, and it also marks a solid step forward for China on the way to the rise of the “National Core.” At the same time, Tuo Jing’s independently developed atomic layer deposition system (ALD) equipment Entering the advanced integrated circuit manufacturing company in Shanghai IC integrated circuit research and development center, applied to the advanced 14-10 nanometer research and development line, which indicates that China has mastered the ALD equipment manufacturing technology side by side with the international, indicating that the ALD equipment will be localized in the chip. Plays an increasingly important role in the process.
Accelerating business development
Industrial clusters highlight
'Tingjing Technology Co., Ltd. is a microcosm of the overall development of Shenyang's integrated circuit industry. At present, Shenyang has gathered a group of high-quality integrated circuit equipment manufacturing leading enterprises. They have their own characteristics and have emerged in the domestic integrated circuit industry.' The person in charge said that in Shenyang, Shenyang Fuchuang Precision Co., Ltd. has become the only provider of full-process process solutions for precision components and components of IC equipment. It has formed aluminum alloy component manufacturing technology as its core, and is targeting semiconductors and aviation. A model of precision and ultra-precision manufacturing in China; Shenyang Zhongkeyi vacuum dry pump has been promoted and applied in domestic 12-inch mainstream production lines, achieving import substitution, becoming the only domestic capable of mass production for integrated circuit process equipment manufacturers and FAB factories. Vacuum dry pump manufacturers; Shenyang Jingyuan Microelectronics's uniform development equipment has occupied more than 60% of the domestic market share, becoming the main equipment for China's semiconductor production line......
While accelerating the accumulation of integrated circuit equipment manufacturing manufacturing enterprises, Shenyang has research institutes such as the Institute of Automation of the Chinese Academy of Sciences and the advantages of personnel in universities and colleges. It is an important equipment production base in the national integrated circuit field. It is foreseeable that the integrated circuit equipment industry will become Shenyang builds a bright new card for Northeast Asia Advanced Equipment Intelligent Manufacturing Center. 'The person in charge of the Municipal Bureau of Science and Technology said that in terms of integrated circuit equipment manufacturing, with the first 12-inch semiconductor thin-film device production base in the country, Shenyang IC equipment precision zero With the successive landing of components, public manufacturing platforms and other projects, the effect of Shenyang's integrated circuit equipment manufacturing cluster will continue to be prominent, and the integrated circuit industry chain will be continuously improved, with unlimited potential for future development.
The visible hand of the government
Promote industrial energy level multiplication
The IC industry has a high technical threshold, large investment, and monopoly, and it is not easy to break through and catch up. It needs the government's 'visible hand' to unite all forces. In the past two years, Shenyang City has successively introduced policies to support IC industry development, 2017 At the beginning of the year, Shenyang proceeded to revise the "Implementation Opinions of the People's Government of Shenyang Municipality on Accelerating the Development of IC Equipment Industry" issued in 2013, and in response to the introduction of "Development Plan for Shenyang Integrated Circuit Equipment and Related Industries (2017-2025). In December 24th, in the name of the municipal government, the “Implementation Opinions of the People's Government of Shenyang Municipality on Accelerating the Development of IC Equipment and Related Industries” was issued. It was proposed from four aspects: technological innovation, industrial development, environmental creation, and talent cultivation. Accelerate the development of IC equipment and related industries, and further guide the innovation and development of IC equipment and related industries in Shenyang.
'The next step, Shenyang will be supported by the national integrated circuit equipment high-tech industrialization base, which will highlight the development of Shenyang's integrated circuit industry cluster, will expand existing enterprises, and introduce the development of upstream and downstream related companies and derivative industries as the development direction for Shenyang's equipment manufacturing. The industry has laid a solid foundation for its transformation and upgrading. According to reports, according to Shenyang's plans for integrated circuits and related industries, by 2020, the scale of Shenyang's integrated circuit industry will reach 10 billion yuan, of which equipment manufacturing will reach 3 billion yuan. The components and equipment will reach 6 billion yuan, and the materials will reach 1 billion yuan. By further strengthening the domestic leading enterprises of integrated circuit equipment, and acquiring related companies at home and abroad, we will continue to expand the Shenyang IC industry space and create industrial highlands. In the future, Shenyang will become a global player. Integrated circuit equipment R & D, production and supply base.