In China, if you mention the research and industrialization of high-end silicon-based SOI materials, people in the industry will mention a name—Wang Hao.
Wang Hao, Academician of the Chinese Academy of Sciences, China's well-known expert in semiconductor materials, director of the Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, and the chief pioneer and leading figure of high-end integrated circuit substrate materials in China.
On March 23, at the age of 52, he won the 2017 Science and Technology Award at the Shanghai Science and Technology Awards.
Setting sail: Industrialization first
China's core SOI technology
In 1996, after graduating from Ph.D., Wang Hao visited the largest research base of ion beam materials in Europe as a visiting scholar at the Rosendorf Research Center in Germany. In 1997, the Chinese Academy of Sciences was implementing a knowledge innovation project. At that time, he was the director of the Shanghai Microsystem Institute of the Chinese Academy of Sciences. Jiang Mianheng found him through Germany and hoped that he would go back to China. Although the study of Wang Ho’s “Humboldt” visiting scholars was not completed until one year later, he was eager to return, and he refused to stop the retention of the head of the German research institute in June 1998. Return home.
Soon after Wang Shuo returned to China, he was informed that he was shocked by the Chinese material community. IBM announced that it will apply the internationally recognized 21st century microelectronics new material SOI to the production of processor chips, which will lead a group of well-known semiconductor multinational companies to develop this technology. SOI , Silicone-on-insulator abbreviation, Chinese translation of insulator silicon. Internationally recognized, SOI has important application value in low voltage, low power circuit, high temperature circuit, micro-mechanical sensors, photoelectric integration and other aspects.
Wang Min realizes that it is imminent to upgrade the research and application of SOI technology in China and realize the industrialization process. 33-year-old Wang Hao resolutely assumes the important task of leading the scientific research team to focus on the key technology of ion implantation in the preparation of SOI materials in order to catch up as soon as possible. The international advanced level has struggled in the laboratory day and night. The struggle has ushered in the dawn. In 2000, ion beam in-situ doping technology gained important progress, and relevant papers have attracted the attention of international counterparts.
Wang Hao said that scientists in basic research should care about the country’s needs for industry and combine research with the country’s strategic needs. He also did so. Wang Xi and his team are proud of their innovation through technology. And R & D, to solve China's aerospace electronic devices are in urgent need of SOI products, 'there are no' issues, for China's special areas of core components to make independent control of outstanding contributions.
Over the years, Ms. Wang has devoted herself to the study of the physical phenomena of energy-carrying ion beam and solid interaction and the industrial transfer and transformation. He has published more than 400 papers in international academic journals and academic conferences, and has applied for more than 160 patents for inventions; he has also won the Heliang Holy Foundation. Science and Technology Progress Award, Outstanding Science and Technology Achievement Award of the Chinese Academy of Sciences (first accomplished person), First Prize of Shanghai Science and Technology Progress Award (first accomplished person) and other awards as well as Shanghai Leading Talent, National Innovation Competition Prize.
Pilotage: Successfully Implementing a New Generation of Silicon-based Materials
Industrialization of SOI Technology Achievements
If from 1998 to 2001 SOI stepped out of the laboratory, then from 2001 onwards, SOI officially faced the main battlefield of the national economy and 'underwater test'.
In July 2001, in order to apply scientific research and technology to the development of SOI for high-end integrated circuit substrate materials, Wang Hao promoted the establishment of Shanghai Xinao Technology Co., Ltd. by the Shanghai Institute of Microsystems, Chinese Academy of Sciences. He entered the SOI group with five doctors. The company, the scientist Wang Yi, transformed into chairman and CEO.
After unremitting efforts, the research team developed the ultra-low dose SOI process and created an oxygen-bonded Simbond-SOI technology with its own intellectual property rights in the world. Wang Yan frankly stated that when he and his team have worked hard for many nights, they produced One by one, crystal-clear 'sandwich' wafers, everyone's happiness and excitement overflowed.
However, the management and management companies still have insufficient technology, financing, equipment introduction, technological breakthroughs, and market expansion... All the processes are more difficult than expected. Wang Yu said that the twists and turns encountered in each link are enough to make people Abandoned, talked about more than 100 to complete only financing.
With the belief of perseverance, Wang Hao and his team worked together to help each other and survived one storm after another. All the people rowed to open a large ship, and finally realized the industrialization of SOI materials and filled the domestic gap. China created silicon. Tablets, exported to Western developed countries, successfully achieved China's leapfrog development of microelectronics materials.
As a result, 'R&D and industrialization of high-end silicon-based SOI materials' won the first prize of the National Science and Technology Progress Award in 2006. Shanghai New Pride Technology Co., Ltd. has also successfully completed the industrialization of 8-inch SOI materials in China, becoming the only SOI material in China. R & D and production base.
In 2014, Shanghai Xinao Technology Co., Ltd. and Soitec, the world's largest SOI producer, signed a cooperation agreement to consolidate the strategic partnership between the two parties and establish the status of Chinese companies in the international arena. Wang Hao still remembers that year Initially, in France, she had to stroll around the entrance of Soitec and could only chat with the guards. Unexpectedly, many years later, he and the giant of the industry could sit on the equal footing in their own country to shake hands and cooperate.
Assistant Director of the Shanghai Institute of Microsystems, Chinese Academy of Sciences, and General Manager Qin Wei of Xinwei Group, told the reporter that as a business leader, Wang Hao is highly innovative. This awareness of innovation is not only expressed in technology, but also reflected in Innovation in institutional mechanisms. He promoted the establishment of venture capital funds. He did not intervene in the judgment of investment experts. He believed that professionals were more familiar with capital markets than scientists.
Li Wei, executive vice president of the company, believes that Wang Hao has a keen observation of the international market for silicon materials. His investment decisions and courage are more admirable. Under his decision, the company successfully invested in two international acquisitions.
Currently, Wang Shuzheng leads his team and continues to walk on the road to industrialization. Wang Hao vigorously promotes a number of major semiconductor projects in Shanghai. He actively develops 12-inch FD-SOI industry from the perspective of materials, manufacturing and design. Road Overtaking's strategic plan; Initiated the establishment of the largest 12-inch wafer manufacturing company in China, Shanghai Xinsheng Semiconductor Co., Ltd., successfully pulled out China's first high-quality 12-inch single-crystal silicon rod, and sold 12-inch silicon in 2017. Nearly 100,000 tablets, to fill the gap in China's large-size silicon industry.
Heavy responsibility: Zhang Jiang Lab
The struggle for development
Wang Shuo has many different identities. One of them is the director of the Zhangjiang Lab, which was jointly established by the Chinese Academy of Sciences and the Shanghai Municipal People's Government.
Wang Hao said that on September 26, 2017, the Zhangjiang Laboratory was formally established and opened a new chapter in the construction of the Shanghai Science and Innovation Center. In just over four months, Zhang Jiang’s laboratory has achieved all Azimuth, Substantial Phase Progression. Shanghai Super-strong laser experiment device achieved 10 watts of amplification output last year. It was selected as '20 landmark scientific and technological achievements produced by the Chinese Academy of Sciences since the 18th Congress'. Hard X-ray free electron laser device The construction of the project is the largest major science and technology infrastructure ever invested in China. These major infrastructures and major innovation achievements have laid a solid foundation for the construction and development of the Zhangjiang Laboratory.
He hoped that through his own efforts, he could help Shanghai build a platform for scientific and technological innovation with global influence, gather more parties in a more open stance, and realize the strategic supporting role of technological innovation for the development of the country.