Set micro-grid news, CCTV large documentary on the 3rd night of the second quarter of the second installment of "Great Power" second set of "win in the Internet," a heavy broadcast, the micro-semiconductor equipment (Shanghai) Co., Ltd. 7-nanometer chip etching machine honored Included in them.
The state-of-the-art technology node for the energy production in the semiconductor industry is 7nm and TSMC leads the industry in terms of manufacturing technology for the 7nm device, including Applied Materials, LAM, Tokyo Power (TEL), Hitachi (Hitach), semiconductor in the micro-semiconductor is the only penetration into TSMC 7-nanometer etching equipment manufacturing equipment in mainland China.
This time included CCTV, is the micro, but also China's first self-developed seven-nanometer chip etching machine, which uses a plasma etching technology. The use of chemically active plasma, carved out of the microscopic silicon Circuit.
According to reports, the ICP chip etching, the size of the key size and the chip temperature has a one-to-one relationship if we require etching uniformity of 1 nm, then the temperature difference across the chip should be controlled within 2 degrees. Micro-self-developed temperature control design, can make the temperature control accuracy of the etching process maintained within 0.75 degrees, better than the international level.
One of the most important core components of an etcher is the Gas Spray Tray, which is also a key technology point in a 7nm chip-etching machine whose material selection and design are crucial to the performance of the etchant machine. Micro and domestic manufacturers to develop and optimize a set of plasma-enhanced physical and chemical precipitation of cermets, this innovative method has greatly improved the performance of the material, the grain is more refined, dense, the defect is almost Zero compared to the current use of the spray plate, China's ceramic coating spray disc life can be doubled, the cost is less than one-fifth.
Dr. Yin Zhiyao, chairman and chief executive officer of Micro and Micro Corporation, said: 'China is becoming a big country in the production of integrated circuit chips and micro-devices. By 2020, the investment in China's new chip production line will surpass that of the United States, Japan and South Korea Investment, China will become one of the largest chip production base and we believe that by 2030, China's chip and micro-device processing capacity and scale will be able to fully catch up and in many ways more than the international advanced level.
Lithography technology is still backward, China eagerly looking forward to EUV supply
It is noteworthy that, the micro-etching machine has a place in the field, but in the advanced process of the most important lithography machines, especially in the field of extreme ultraviolet lithography, only ASML global production.
Lithography is one of the core devices in chip manufacturing and can be divided into several types depending on the application: a lithography machine for producing chips; a lithography machine for packaging; and a projection lithography machine for LED manufacturing. The lithography machine used for producing the chip is the biggest short board that the Chinese makes in the semi-conductive apparatus manufacture, the domestic high-end litho machine that the fab needs is totally dependent on the import.
EUV lithography is a projection lithography technology that uses a wavelength of 13.5 nm EUV as a working wavelength and represents the highest level of current application optics, and is the industry's next mission to save Moore's Law as the next generation of lithography .
Lithography machine industry as the crown jewel in the integrated circuit industry, research and development of technology threshold and funding threshold is very high.It is precisely because of this, can produce high-end lithography machine manufacturers are very few, to the most advanced 14nm lithography machine Only ASML, Japan's Canon and Nikon have basically abandoned the development of the sixth generation EUV lithography.
In contrast, the high-end lithography machines required by domestic fabs rely entirely on imports, which not only makes the domestic fabs spend huge sums of money buying equipment, but also has a significant adverse effect on industrial development and the growth of autonomous technologies.
As for ASML, which occupies 80% of the market, according to its second-quarter 2017 results, 8 EUV system orders were added in the second quarter of 2017, bringing the total number of EUV lithography un-shipped orders to 27, Up to 2800000000 euros.The company now has an annual output of 12 units, 2018 will increase to 24 units in 2019 to reach an annual output of 40 units of production capacity.
This capacity is far from meeting the needs of global fabs. Therefore, in response to the rumor that EUV equipment is banned in China, ASML explained that ASML does not treat mainland fabs and international customers alike as long as customers Single, EUV to be imported to China there is no problem in the delivery, all customers are also exactly the same from the order to the formal delivery, are 21 months.The company disclosed that there are already mainland fab giant and ASML start 7-nanometer process EUV order negotiations, in 2019 the mainland's first EUV is expected to land.
Whether it is forbidden for sale or waiting in line, it is certain that the Chinese echelon will definitely not be within the scope of the priority supply, as evidenced by the shortcomings of equipment in the development of the domestic semiconductor industry.
The birth of EUV is the result of efforts made by all industries
Domestic semiconductor professionals revealed that AMSL has been able to seize the opportunity at an historic and crucial moment, and achieve technological leaps and bounds, thanks to the company's 'open innovation architecture', and become the company infiltration of the historic turning point The birth of the lithography machine, but also the result of many vendors and fabs work together.
For example, a process developer at a leading foundry said he has provided dozens of improvements to ASML at the company's Advanced Process Research and Development division, and thousands of proposals for improvement at each fab.
R & D to mass production process is full of rough EUV even more so.
As we all know, with the evolution of Moore's Law, the more advanced process technology research and development costs are higher, can be called astronomical, can invest funds to keep up with the semiconductor manufacturers have been less and less, EUV's high R & D costs even not even a The company can afford it.
At that time, because of the technical difficulty of the EUV, the amount of investment required was too high, and the other two litho equipment manufacturers, Japan's Nikon and Canon, have already given up development. ASML has become the semiconductor industry can continue to sprint the next generation of advanced process development The last hope for a more power efficient and faster transistor.
ASML also learned that it can not afford this huge device development costs, for which the company sent injections to giants such as Intel, Samsung, and TSMC, and subsequently succeeded in turning its existing customers into investors Intel, TSMC, and Samsung each later invested USD4.1 billion, 276 million euros and 779 million euros in ASML to fund the research and development of EUV.
Dilemma of domestic semiconductor equipment, the spark of the stars waiting for a prairie fire
According to incomplete statistics, five 12-inch wafer fabs will be built in mainland China from 2018 to 2020 with a total investment of more than 300 billion yuan and the "war of installation" is expected to start in 2018. The demand for semiconductor devices has risen sharply. According to China According to statistics from the Customs Information Network, the total amount of major semiconductor equipment imports in Mainland China reached 5.483 billion U.S. dollars, up 13.8% over 2017. It is estimated that the sales revenue of domestic semiconductor equipment will reach 7.6 billion yuan by 2017, an increase of over 32% over the same period of last year.
In the face of huge demand, the domestic is facing the semiconductor equipment is almost entirely dependent on imports.China Electronic Equipment Industry Association Secretary-General Jin Cunzhong pointed out that the domestic equipment accounted for only 2% of the total global semiconductor.
In the wave of rapid development of the semiconductor industry, the state has promulgated the "Very Large-Scale Integrated Circuit Manufacturing Equipment and Complete Technology Program" (02 Special) for major scientific and technological projects. China's semiconductor equipment industry achieved a breakthrough from scratch. According to CCID Think tank data, many semiconductor companies, Shenyang Tuo Jing, Beijing Hua Chuang and many other company's products have passed the process of assessment and production line verification.China's semiconductor manufacturing industry down to earth for many years, the courage to innovate, some companies began to enter the capital market, Some machines already have import substitution capability and are expected to be the first to enjoy the downstream expansion bonus to meet the peak demand of equipment, but in general, China's equipment industry still faces many challenges.
Insiders point set micro-network pointed out that the semiconductor is not only a market-oriented industries, but also a very high threshold of the industry, which will inevitably lead to the latecomers to study very difficult to domestic equipment, for example, many production lines are not willing to purchase domestic Equipment, do not want to give domestic equipment trial opportunities, because they have to consider the economic benefits, the choice of mature foreign equipment is the safest way, and choose a lot of domestic equipment risk. Domestic equipment because there is no trial of opportunity, no problems, improve Problem opportunity, so hard to make rapid progress.
For companies that manufacture complex products, there is a gradual rise in trial and error learning process is very important, however, 'one is not willing to use, because that the equipment is not good; one because no one use, so there is no opportunity to improve the domestic semiconductor equipment industry It's in an endless loop. '
From the perspective of the fab, it was also pointed out: The government has been promoting the application of domestic equipment, but it can not make decisions on behalf of the production line. By then, who will not be responsible for the yield?
'Most cases are not taken for granted by domestic industry, the most ridiculous is that many people have never seen a chip, but also to do semiconductor projects or copy the field of semiconductors, the results on some key issues of intelligence is to play a fantasy.' A R & Net so Tucao.
Although difficult, domestic semiconductor equipment still have the opportunity? Some point of view, if the emerging equipment to solve new problems, as long as it is not a positive competition with the giant equipment, there is a chance.Many domestic equipment is just a substitute for mature equipment abroad, This is a positive competition, very difficult.
Others point out that devices, photoresists, slurries, targets, etc. have the opportunity at any time, as long as taken seriously, the fab is open, afraid of blind flicker. 'Jiang Feng to do the target, the etching done in the micro Machine, Han micro-branch to do e-beam, LG do bare wafer, are good examples. The biggest shortcoming is the lithography machine. 'The industry said that the' 02 domestic special, has hatched a number of enterprises, these Business is the type of fire and they are not big enough now, but I believe they will seize some of the turning points in industrial development and grow with the Chinese fab.
2. China will build 156 satellite space-based Internet WiFi signals covering the whole world;
More recently, Falcon IX rockets carried two small satellites - Tintin-a and Tintin-b - on a regular launch mission, which are test stars of the StarLink program and will be launched on Earth Communications test.The project plans to launch nearly 12,000 small satellites by 2024 to launch high-speed Internet services to the world.
Global mobile broadband satellite Internet system is about to start construction
The reporter learned from China Aerospace Science and Technology Corporation that the group plans to launch the construction of the global mobile broadband satellite Internet system this year in an all-round way.The system is a communications satellite constellation deployed in low orbit and the first phase of construction will launch 54 satellites and will be implemented subsequently The second phase of construction, to achieve a smooth transition of system capabilities, the number of satellites will be more than 300.
CPPCC National Committee members, Space Technology Group Science and Technology Commission package for the people introduced, the system will be built into a seamless coverage of the world's spatial information network infrastructure for the ground fixed, handheld mobile, car, ship, airborne and other terminals To provide Internet transmission services to enable broadband and narrowband communications coverage in the deep ocean, north and south poles, the 'One Belt and One Road', etc. Through such a seamless coverage system in the world, anyone anywhere on the earth or any Objects, can be achieved at any time information interconnection.
This reporter has learned that the global mobile broadband satellite Internet system will achieve six aspects of application capabilities: First, intelligent terminal communications, support for commercial mobile phone direct access to the satellite constellation, providing high definition voice services, WeChat and other instant messaging services, e-mail services ; Second, the Internet access, providing low-latency data services capabilities, enabling users to enjoy the Internet and the ground network similar to the experience for the field operations and offshore operations and other markets, to achieve distance education, remote health care services protection; third is the Internet of Things And serve the terminal of low energy consumption miniaturization IOT, and focus on developing new industries such as environmental monitoring, ocean logistics, hazardous chemicals monitoring, traffic management, smart ocean and so on. Fourthly, push hot information and make full use of the characteristics of satellite wide area coverage to achieve Fifth, the navigation enhances and forwards the Beidou differential correction information to provide more accurate and reliable information for airborne and vehicular positioning terminals Location service to meet unmanned car driving, drones, Quasi agriculture, engineering machinery market development needs; Sixth, aviation and maritime surveillance aircraft to achieve a global, full-cycle tracking of ships, providing statistical data value-added services.
Rainbow Cloud project this year to launch technology verification star
According to Zhang Zhongyang, member of the CPPCC National Committee and president of the China Academy of Aeronautics and Astronautics, the Aerospace Science and Technology is going to launch the first cloud technology verification satellite in 2018, demonstrating and demonstrating low-level broadband communications demonstration and application.
'Rainbow cloud construction in accordance with the three-step strategy.'Zhang Zhongyang said that after the completion of the first step this year, the second step is to launch four commercial trial star network trial run in 2020 to complete the business test system in 2022, China will deploy and operate the entire constellation and construct a space-based broadband Internet network consisting of 156 satellites to form a comprehensive information system for communications, navigation and remote sensing with low-rail broadband communications and capable of navigating enhanced and real-time remote sensing support. 'By then, Whether we are in the desert, the sea or the plane, we can enjoy the same internet speed and service experience at home. '
This reporter has learned that Rainbow Cloud Engineering is highly advanced and will become the world's first low-band Ka broadband communication system and will be the first in the world to adopt technologies such as broadband inter-satellite communications, broadband on-board broadband, and multi-channel phase shifting chips. Broadband satellites The smallest communication terminal, the smallest power consumption, the lightest weight.
Speaking of foreign technology development, Zhang Zhongyang think SpaceX innovation, the spirit of the challenge is worth learning, the star chain plan handwriting great.Hongyun project although the number and size of small satellite, the goal is consistent with the ultimate realization of the same function.
3. Fuzhou High-tech Zone 5 billion investment in semiconductor new material industrial park project;
Set micro-grid news, according to Jiangxi Daily reported that Fuzhou High-tech Zone vigorously implement innovation-driven strategy, aimed at 'high' and 'new' continue to force, promote industrial agglomeration development, towards the high-end .Fuzhou High-tech Industrial Development Zone in 2017 The amount of quality improvement, the main business income of 45.2 billion yuan, an increase of 10%; completed tax 1.628 billion yuan, accounting for 92.37% of total financial revenue, showing a strong vitality of development.
Fuzhou High-tech Zone to seize the 'cow nose' of scientific and technological innovation, and vigorously promote technological innovation and expansion, and promote the transformation and upgrading of leading industries in the area significantly increased the activity of business innovation and entrepreneurship, last year added 4 national innovation platform, provincial innovation platform 10, above-scale enterprises and the country more than 50 research institutes have established cooperative relations between industry and research institutes, the annual patent applications amounted to 1174 pieces, 600 authorized patents, with invention patents 210. Burson-Marsteller, JMC chassis, Dubico Acquired "National Intellectual Property Advantage Enterprise" by New Energy, and "National Intellectual Property Demonstration Enterprise" by Grand Fukang Medical Co., Ltd. The project of trial manufacture of liberal arts coagulation factor intelligent manufacturing center was piloted in the first half of last year and obtained "GMP Certificate of Drugs" and production capacity of production workshop Last year, the biomedicine, automobiles and spare parts, electronic information and other three major industries in the area achieved a revenue of 32.25 billion yuan and a tax revenue of 1.56 billion yuan, accounting for a total economic income of the High-tech Zone 72.1% of the total amount, of which biomedical industry overall competitiveness ranks the 39th among the national hi-tech zones and was included in the third pilot batch of innovative industrial clusters in China.
At the same time, Fuzhou High-tech Zone vigorously cultivate '10 billion enterprises, one hundred billion industry', through attracting large and strong, support key enterprises and enhance development potential. Last year, the area introduced 48 major industrial projects, of which 100 million yuan extra large Project 8. Investment of 5.50 billion yuan JMC light technological transformation and expansion project, investment of 5 billion yuan Watermark (Fuzhou) New Energy Vehicle Industrial Park project to invest 4.5 billion yuan of cloud computing data center project, investment 40 100 million yuan of Genesis supercomputer center project, investment of 5 billion yuan semiconductor new material industrial park project, 4.5 billion investment in Jianchang help medicine valley production project, added for the future development of new kinetic energy.At present, the city emerged Boyaa Biological, Gold Products Copper, Dubico new energy, Sen Hung Technology, Haili stainless copper, Texas Semiconductor and a number of billion-yuan output sprint leading enterprises.