Recently, Peking University School of Information Science and Technology, Key Laboratory of nano-devices physics and chemistry Ministry Hu Fan and Peng Lv-spear task force research group for ultra-thin flexible electronic devices made important progress in their use of carbon nanotube network film as the channel Materials, fabricated high performance CMOS electronic devices on ultrathin flexible substrates, and successfully applied the sensing integrated system to human body information monitoring.
The research group made full use of the advantages of low temperature processing of carbon nanotube electronic devices, using metal palladium and scandium as electrode contacts, respectively injecting electrons and holes, constructing CMOS devices and circuits on ultrathin flexible substrates, and overcoming the problems of traditional silicon-based technologies The incompatibility of flexible substrates with high-temperature doping is a common problem.The CMOS devices prepared at low temperature have symmetrical performance and the maximum transconductance of 5.45 μS / μm on a flexible substrate is the best reported in the literature, The performance achieved on rigid substrates is comparable, overcoming the ever-present limitations of flexible substrate processing environments for device performance and, for the first time, achieving a 5 MHz circuit oscillation frequency on ultra-thin, flexible substrates into the radio frequency identification (RFID) High-Frequency Operating Range - This is a key breakthrough for enabling future wireless data communications and energy transfer. The devices are fabricated using a lithography process that is compatible with traditional microelectronics processes, ensuring that the devices are scalable. , The research group also realized the integration of the carbon tube circuit and the humidity sensor on the ultrathin substrate, the number of sensing information in situ can be counted According to the treatment, the entire sensing system, with an overall thickness of only 4 μm (less than one tenth of the hair), can be gently applied to the skin to monitor the sweating condition of the skin.
This research fully demonstrates the unique advantages and great potential of CNT electronic devices in the field of flexible electronics. It also reveals that the flexible electronic skin based on carbon nanotube electronic devices is expected to become the next generation of wearable electronic devices to realize both the human body and the digital world Seamless interaction. In early February 2018, related work with "high-performance thin film carbon nanotubes complementary electronics and integrated sensor system" (High-performance carbon nanotube complementary electronics and integrated sensor systems on ultrathin plastic foil) , Published in ACS Nano (DOI: 10.1021 / acsnano.7b09145), an important journal in the field of materials science. Zhang Heng, a doctoral student at the School of Information, is the co-author of the first author, Professor Hu Youfan and Professor Peng Liangyu Corresponding Author.
The above research work has been supported by the Overseas High-level Talents Introduction Program, the National Natural Science Foundation of China, and the National Key Research and Development Program.