Recently, the world's top MEMS meeting and the 31st IEEE MEMS Conference held in Belfast, UK, with 874 papers submitted and 347 accepted, with a 40% acceptance rate. The Northwestern Polytechnical University 'Key Laboratory of Space-Time Micronanology' Ministry of Education Prof. Chang Honglong a total of five papers presented at the meeting, including a paper 'A Micro Resonant Electrometer with 9-Electron Charge Resolution in Room Temperature' after the General Assembly A double-blind review of 38 internationally renowned MEMS experts from the Technical Program Committee (TPC) won the Best Paper Nomination Award for this conference and presented both verbal reports and posters at the conference. The first author of this paper was Yang Jing, a master's student at the XCMG School of Mechanical and Electrical Engineering, supervised by Professor Chang Honglong.
This paper reports an electrometer based on a three-DOF weakly coupled resonator that achieves a 9.21e resolution at room temperature. More importantly, this high resolution is within the large dynamic range of 3 million electrons , Which has important application prospects in the fields of basic physics research, electronic measurement and space exploration.
