Since 2008, EEE equipment has undertaken a total of 02 special '90 -65nm large angle ion implanter R & D and industrialization 'key components and core technology of packaging equipment '45 -22nm low-energy large beam ion implanter R & D and industrialization ''28 -14nm polishing equipment and complete sets of technology, material industrialization' 300mm thin wafer polishing machine R & D and industrialization 'and other projects.
Over the past 9 years, the electric equipment has successively broken through the core technologies of key integrated circuits such as ion implanter and chemical mechanical polishing equipment (CMP), which have made it difficult to tackle key problems and have a strong driving force. It has obtained 146 invention patents and won the certificates of provincial and ministerial level More than 22 awards; built in line with SEMI standard ion implanter batch manufacturing platform, the establishment of a post-doctoral research station; CMP R & D platform was approved 'Beijing Chemical Mechanical Flattening Process Equipment Engineering Research Center'; made the first ion implanter, 200mmCMP equipment into SMIC's large production lines, advanced packaging equipment with integrated service capabilities, access to advanced packaging leading enterprises ......
Diligently describe the responsibility and responsibility of the foundation stone
Integrated circuit chips are the core cornerstone of the information age, and integrated circuit manufacturing technology represents the highest level of ultra-precision manufacturing in the world today. The integrated circuit industry has become a strategic industry that affects social security, economy and national defense security and overall competitiveness.However, Due to the capital-intensive, technology-intensive and talent-intensive features of the integrated circuit industry, for a long time, the IC industry in our country has been subject to various constraints in the advanced manufacturing equipment, materials and processes in the West. The high-end chips mainly rely on imports. For many years, the annual import value of circuit products has exceeded 200 billion U.S. dollars, surpassing that of oil and becoming the largest imported product. In 2008, the state started the project of "02 Specialization", mainly focusing on the independent innovation of equipment, process and materials.
Zhang Beixu, director of Beijing Economic Commission, said that high-end equipment and materials have filled the industrial chain from scratch, and that the manufacturing process and package integration have been gradually changing from weak to strong to participate in international competition. This shows that the national science and technology major project is creating an innovation system for integrated circuit manufacturing In recent years, the vigorous development of China's IC industry, major projects have played a significant role in innovation leadership and technical support in the 02 special high-end equipment research, electrical equipment has played a pivotal role.
E-Tech is a wholly-owned subsidiary of China Electronics Technology Group Corporation (hereinafter referred to as China Electonics), established in 2013 by the integration of two E-Techco, Forty-five and Forty-eight and its 11 holding companies , Across Beijing, Taiyuan, Changsha, Shanghai and other six provinces and eight parks.
Since the founding of the establishment, the electrical equipment held high the flag of the national team of electronic manufacturing equipment, carry forward the hardships, stresses dedication, willing to adhere to the 'decade grinding sword' equipment, according to 'key breakthroughs, platform support, partial package, integrated services' Development ideas, adhere to innovation and development, adhere to the integration of civil and military, adhere to the equipment to serve the country, overcome the integrated circuit manufacturing key equipment ion implanter, chemical mechanical polishing equipment and other key technologies to solve a group of China's military electronic components to control the development of self- Card neck 'problem, supporting the rapid development of semiconductor and emerging electronic components industry, to express the responsibility and responsibility of the Great Power Equipment.
Relying on the accumulation of technology in the field of integrated circuit core equipment for many years and the scientific research and production technology of military industry, the electric equipment has formed a local complete set and integrated service capability of high-end display, new energy sources of photovoltaic, power semiconductor materials and other pan-semiconductor equipment, and greatly improved the equipment localization rate. At present, it is the major integrated circuit equipment, the largest high-end display equipment, photovoltaic manufacturing equipment, power battery material manufacturing equipment suppliers, with the integrated circuit of local complete sets and system integration capabilities, with a complete photovoltaic industry chain and turnkey capacity of the entire line.
Breaking the monopoly Forging a breakthrough in key technologies of domestic brand ion implanter patents, made 101 invention patents, international patents 2, has achieved a series of products and used in SMIC 90nm, 55nm, 40nm, 28nm process line ... ... This is the electrical equipment Bear 02 special two ion implantation machine research and development projects made some of the results.
Ion implanter is the core equipment in the manufacture of integrated circuit (IC), which mainly injects the particles into the semiconductor material to control the conductivity of the semiconductor material and form the basic unit of the integrated circuit device such as the PN junction. As the only one in China R & D, manufacturing and service in one of the ion implanter suppliers, electrical equipment in the commitment 02 special, the ion implanter R & D in a year to a new level in 2014, 12-inch beam ion implantation machine to Excellent level through the implementation of the national 02 special implementation management office of the organization's acceptance.In 2015, SMIC has completed the 55nm, 45nm and 40nm small batch product process verification, the first domestic beam ion implantation opportunities to achieve the first mass production wafer In 2016, the new model 45-22nm low energy large beam ion implanter was introduced to meet the high-end technology, and the medium-beam and low-energy large-current series products were batch-applied to the IC main line in 2017. The mass production conditions of ion implanter in 2017 Plant and process laboratory put into use, with the standardization of the industrial platform in line with SEMI, with an annual output of 50 units, and the application of information management system Batch ion implanter for manufacturing quality control and traceability throughout.
'Accumulation thick device, for the equipment manufacturing industry, not only concerned about the development of a single device, within a certain range of supply, the formation of a platform for the production capacity is even more important.' Chairman Liu Jidong, party secretary stressed that the electrical equipment Independent research and development of ion implanters broke the monopoly of the high-end market by the United States and Japan, creating a domestic brand ion implanter.
Zero breakthrough domestic 200mmCMP enter SMIC production line validation
On November 21, 200MW CNC commercial machine independently developed by EDB equipment was tested internally and sent to SMIC Tianjin Company for on-line verification, which is the first time that a homemade 200mm CPM device has entered the large integrated circuit production line, effectively solving the problem of restricting the autonomy of China's IC industry Controllable bottlenecks of development.
CMP is one of the seven key devices in integrated circuit fabrication for planarization and copper interconnect processes.
Electrical Branch equipment difficulties, both ends of the force in the commitment of 'Twelve Five' 02 special '28 -14nm polishing equipment and complete sets of technology, materials industrialization 'project at the same time, facing the urgent needs of the domestic market, independent research and development 200mmCMP commercial equipment, the formation of 300mm, 200mm equipment R & D go hand in hand, mutual support situation.
Beginning in January 2015, the R & D team of CMP equipment in the Electric Equipment Group has spent countless sleepless nights pouring out the CMP equipment industrialization: breakthrough of more than 10 key technologies, completed more than 50 technical improvements and finally in 2017 In August of this year, it successfully developed the first 200mm CMP commercial machine with completely independent intellectual property rights in China and succeeded in breaking the monopoly of foreign technology blockade. The rigorous 10,000-piece marathon test is comparable to similar international equipment.
It is reported that in the next 6 months, 200mm CMP equipment to formally accept the test of large-scale production, equipment reliability and consistency will be subjected to rigorous examination.
Complete sets of advanced packaging supply key equipment batch applied to the leading enterprises
Packaging equipment sales of more than 2,000 sets, has been used in batches Changdian Technology, Tong Fu Microelectronics, Suzhou Jing Fang and other well-known domestic packaging and testing companies - in the field of high-end packaging equipment, electrical equipment has formed a partial supply of local capabilities.
Since the 11th FYP, with the support of Special 02, the electric equipment has taken on 300mm ultra-thin wafer thinning and polishing machine and the key components of packaging equipment and core technologies and product development projects, etc. Now, electric equipment The research and development of flip-chip bonding machines, automatic wafer thinning machine, automatic precision scribing machine to reach the leading domestic and international advanced level; and independent research and development of equipment to build integrated circuit advanced packaging equipment, local process validation line for the sustained Improve the stability and reliability of domestic integrated circuit packaging equipment to provide a good platform.
'At the time of equipment development, we need to design and manufacture equipment based on process requirements, and continuously verify the process,' said Liu Jidong.
At present, the packaging equipment technology verification line has three major functions: First, verify the equipment, verify the process, the thinning, cutting, flip-chip, wire bonding and other equipment in the verification line stability, reliability, process adaptability Assessment and verification; the second is to verify the batch production of equipment to enhance the ability of batch delivery of equipment; the third is to strengthen the ability of local into a line, to provide the overall solution to gain experience.
Responsibility call to play, the mission lead the future.
As a national team in the field of electronic manufacturing equipment, electrical equipment will uphold the important task of providing equipment to serve the country and build "high power equipment" of electronic high-end equipment, which will form the cornerstone of the country. In the future, focusing on the key technologies for manufacturing integrated core equipment, Adhere to scientific and technological innovation and industry into a two-wheel-drive, sustained force around the equipment and equipment industry under the support of related industries, efforts to enhance the level of industrialization, through the whole outreach, gathering resources, construction of Beijing integrated circuit equipment innovation center and industrialization Base, China E-Techco (Shanxi) Electronic Information Technology Innovation Industrial Park and Changsha Photovoltaic Equipment Industrial Park to serve the national and local development; at the same time, cultivate the ability to intelligently create electronic subdivision industry standard formulation, intelligent equipment manufacturing and intelligent manufacturing system solutions It has become one of the mainstream smart manufacturing backbone enterprises and intelligent manufacturing system solution providers in China.