28nm ion implanter in the SMIC 12-inch production line site
200mmCMP equipment into SMIC production line for process validation
PERC high efficiency photovoltaic cell intelligent manufacturing production line of core smart equipment localization rate of 91.8%
Recently, China Electronics Technology Group Co., Ltd. (hereinafter referred to as electrical equipment) came good news, independent research and development of China's first beam ion implantation machine in the SMIC production line stable film more than 2 million, the first 200mmCMP Equipment sales achieved.This is the epitome of the major achievements made by the electric equipment company in undertaking the major project of "Very Large Scale Integrated Circuit Manufacturing Equipment and Complete Technology" (hereinafter referred to as the "02 Special Project").
In the past nine years, EEE equipment has undertaken a total of 02 special '90 -65nm large-angle ion implanter R & D and industrialization ',' Key components and core technology of packaging equipment ', '45 -22nm low energy large beam ion implanter R & D and industrialization' 28-14nm polishing equipment and complete sets of technology, material industrialization '300mm thin wafer polishing machine R & D and industrialization' and other projects.
Over the past 9 years, with the support of Special Project 02, the electric equipment has successively broken through the core technologies of key integrated circuits such as ion implanters and chemical mechanical polishing equipments (CMPs), which have made great efforts to tackle key issues and have won the invention patent authorization , Won 22 awards above the provincial and ministerial levels; built in line with SEMI standard ion implanter batch manufacturing platform, the establishment of post-doctoral research station; CMP R & D platform was approved, "Beijing Chemical Mechanical Flattening Process Equipment Engineering Research Center" Domestic first ion implanter, 200mmCMP equipment into the SMIC's large production line, advanced packaging equipment with integrated service capabilities, access to advanced packaging leading enterprises ......
Diligently describe the responsibility and responsibility of the foundation stone
Integrated circuit chips are the core cornerstone of the information age. Integrated circuit manufacturing technology represents the highest level of ultra-precision manufacturing in the world today. The integrated circuit industry has become a strategic industry that affects social security, economy and national defense security and overall competitiveness.
However, due to the capital-intensive, technology-intensive and talent-intensive IC industries, for a long time, the IC industry in China has been subject to various restrictions in the advanced manufacturing equipment, materials and processes in the West. The high-end chips mainly rely on imports. China's annual output of integrated circuit products for many years more than 200 billion U.S. dollars, more than oil to become the largest imported products.
In order to realize the independent innovation and development, in 2008, the state started the special project of 02 and focused on the independent innovation of equipment, process and materials.
Zhang Beixu, director of Beijing Economic Commission, said that high-end equipment and materials have filled the industrial chain from scratch, and that the manufacturing process and package integration have been gradually changing from weak to strong to participate in international competition. This shows that the national science and technology major project is creating an innovation system for integrated circuit manufacturing In recent years, the vigorous development of China's IC industry, major projects have played a significant role in innovation and technical support.
In 02 special high-end equipment research, electrical equipment has played a pivotal role.
E-Tech is a wholly-owned subsidiary of China Electronics Technology Group Corporation (hereinafter referred to as China Electonics), established in 2013 by the integration of two E-Techco, Forty-five and Forty-eight and its 11 holding companies , Across Beijing, Taiyuan, Changsha, Shanghai and other six provinces and eight parks.
Since the founding of the establishment, the electric equipment held high the flag of the national team of electronic manufacturing equipment, carry forward the hard work, talk about dedication, willing to adhere to the 'decade grinding sword' equipment, according to 'key breakthroughs, platform support, partial package, integrated services' Development ideas, adhere to innovation and development, adhere to the integration of civil and military, adhere to the equipment to serve the country, overcome the integrated circuit manufacturing key equipment ion implanter, chemical mechanical polishing equipment and other key technologies to solve a group of China's military electronic components to control the development of self- Card neck 'problem, supporting the rapid development of semiconductor and emerging electronic components industry, to express the responsibility and responsibility of the Great Power Equipment.
Relying on the accumulation of technology in the field of integrated circuit core equipment for many years and the scientific research and production technology of military industry, the electric equipment has formed a local complete set and integrated service capability of high-end display, new energy sources of photovoltaic, power semiconductor materials and other pan-semiconductor equipment, and greatly improved the equipment localization rate. At present, it is the major integrated circuit equipment, the largest high-end display equipment, photovoltaic manufacturing equipment, power battery material manufacturing equipment suppliers, with the integrated circuit of local complete sets and system integration capabilities, with a complete photovoltaic industry chain and turnkey capacity of the entire line.
Break the monopoly forging ion implantation machine made brand
Breakthrough in key technologies, made 101 invention patents, 2 international patents, has achieved a series of products and used in SMIC 90nm, 55nm, 40nm, 28nm process line ... ... This is the electrical equipment to undertake 02 special two ion implantation machine research and development Some achievements made by the project.
Ion implanters are the core equipment of integrated circuit manufacturing - mainly injecting particles into the semiconductor material to control the conductivity of the semiconductor material to form the basic unit of the integrated circuit device such as the PN junction.
As the only one that integrates R & D, manufacturing and service in one ion implanter, after having undertaken the 02 special project, the electrical equipment has taken a new step in the R & D of ion implanter.
In 2014, the 12-inch medium beam ion implanter passed the acceptance test organized by the State 02 Special Implementation Management Office with excellent level. In 2015, SMIC completed successively the process verification of 55nm, 45nm and 40nm small-batch products, Flow ion implantation rate of the first to achieve the mass production of wafers over a million in 2016, introduced to meet the new high-end technology of the new model 45-22nm low-energy large beam ion implanter, beam, low-energy large beam products batch applications IC Line In 2017, the ion implanter mass production conditions factory and process laboratory put into use, with the meet the SEMI standard industrial platform, with an annual capacity of 50 units, and the application of information management systems to achieve mass production of ion implanter mass production And trace back.
'Accumulation thick device, for the equipment manufacturing industry, not only concerned about the development of a single device, within a certain range of supply, the formation of a platform for the production capacity is even more important.' Chairman Liu Jidong, party secretary stressed that the electrical equipment Independent research and development of ion implanters broke the monopoly of the high-end market by the United States and Japan, creating a domestic brand ion implanter.
Zero breakthrough domestic 200mmCMP enter SMIC production line validation
On November 21, 200MW CNC commercial machine independently developed by EDB equipment was tested internally and sent to SMIC Tianjin Company for on-line verification, which is the first time that a homemade 200mm CPM device has entered the large integrated circuit production line, effectively solving the problem of restricting the autonomy of China's IC industry Controllable bottlenecks of development.
CMP is one of the seven key devices in integrated circuit fabrication for planarization and copper interconnect processes.
Electrical Branch equipment difficulties, both ends of the force in the commitment of 'Twelve Five' 02 special '28 -14nm polishing equipment and complete sets of technology, materials industrialization 'project at the same time, facing the urgent needs of the domestic market, independent research and development 200mmCMP commercial equipment, the formation of 300mm, 200mm equipment R & D go hand in hand, mutual support situation.
Beginning in January 2015, the R & D team of CMP equipment in the Electric Equipment Group has spent countless sleepless nights pouring out the CMP equipment industrialization: breakthrough of more than 10 key technologies, completed more than 50 technical improvements and finally in 2017 In August of this year, it successfully developed the first 200mm CMP commercial machine with completely independent intellectual property rights in China and succeeded in breaking the monopoly of foreign technology blockade. The rigorous 10,000-piece marathon test is comparable to similar international equipment.
It is reported that in the next 6 months, 200mm CMP equipment to formally accept the test of large-scale production, equipment reliability and consistency will be subjected to rigorous examination.
Complete sets of advanced packaging supply key equipment batch applied to the leading enterprises
Packaging equipment sales of more than 2,000 sets, has been used in batches Changdian Technology, Tong Fu Microelectronics, Suzhou Jing Fang and other well-known domestic packaging and testing companies - in the field of high-end packaging equipment, electrical equipment has formed a partial supply of local capabilities.
Since the 11th Five-year Plan period, with the support of 02 special project, the electric equipment has undertaken 300mm ultra-thin wafer thinning and polishing machine and packaging equipment key components and core technologies and product development projects.
Today, the development of electrical equipment, flip chip bonding machine, automatic wafer thinning machine, automatic precision scribing machine to reach the leading domestic and international advanced level; and independent research and development of equipment to build the advanced integrated circuit packaging equipment for the local process Verify the line, in order to continuously improve the stability and reliability of domestic integrated circuit packaging equipment provide a good platform.
'At the time of equipment development, we need to design and manufacture equipment based on process requirements, and continuously verify the process,' said Liu Jidong.
At present, the packaging equipment technology verification line has three major functions: First, verify the equipment, verify the process, the thinning, cutting, flip-chip, wire bonding and other equipment in the verification line stability, reliability, process adaptability Assessment and verification; the second is to verify the batch production of equipment to enhance the ability of batch delivery of equipment; the third is to strengthen the ability of local into a line, to provide the overall solution to gain experience.
Responsibility call to play, the mission lead the future.
As a national team in the field of electronic manufacturing equipment, electrical equipment will uphold the important task of providing equipment to serve the country and build "high power equipment" of electronic high-end equipment, which will form the cornerstone of the country. In the future, focusing on the key technologies for manufacturing integrated core equipment, Adhere to scientific and technological innovation and industry into a two-wheel-drive, sustained force around the equipment and equipment industry under the support of related industries, efforts to enhance the level of industrialization, through the whole outreach, gathering resources, construction of Beijing integrated circuit equipment innovation center and industrialization Base, China E-Techco (Shanxi) Electronic Information Technology Innovation Industrial Park and Changsha Photovoltaic Equipment Industrial Park to serve the national and local development; at the same time, cultivate the ability to intelligently manufacture electronic subdivision industry standards, intelligent equipment manufacturing and intelligent manufacturing system solutions It has become one of the mainstream smart manufacturing backbone enterprises and intelligent manufacturing system solution providers in China.