At present, information technology represented by intelligent sensor terminals, big data, cloud computing, artificial intelligence and the like are accelerating innovation, and the intelligent era of everything is coming in. The technology of "surpassing Moore" is based on sensors and combines radio frequency, power, micro Energy and other technologies is the basis for the future realization of all things Internet.Viewing the status quo beyond the Moore field in our country, despite many years of theoretical research and technical verification, has accumulated a wealth of valuable knowledge and experience, but in the real product into the practical application often There is a disconnect between the production platform.This is due to the MEMS technology involved in the development of a longer product chain, and its 'non-standard' feature makes its R & D and innovation needs and production line has a longer run-in period, Different from the standard CMOS process, it can be said that the production line is "heavily dependent." However, the pilot plant is a necessary stage and is currently facing the challenge of domestic sensor manufacturers. According to statistics, scientific and technological achievements have passed the pilot test and the industrialization success rate can reach 80 %, Without the pilot success rate of only 30% .Based on this background, ITRI based on the domestic first-class IC research and development and industrial base in Shanghai, Chi More than Moore implementation plan for the international advanced level parallelism in this area. As a platform for innovative functions, 8 inches R & D pilot line located in Jiading, filled a gap in this field.
R & D pilot line focus on 'beyond Moore' products and technologies, with nearly 5,000 square meters of high-level micro-nano processing plant clean, you can fully surface, body, 3D micro-nano processing technology and new technology, new devices, new systems R & D and mass production R & D pilot line focuses on the development of surface silicon, bulk silicon and 3D micro / nano processing technology and deploys MEMS, silicon photonics, radio frequency, silicon based III-V family , 3D integrated, MR magnetic, power and biological related technology and measurement equipment, providing a full range of product development, small batch production, technical training, equipment verification and other services for domestic and foreign customers with excellent full service. Technical route and equipment selection refer to the configuration of the mainstream foundries at home and abroad, to enhance the success rate of research and development, help to achieve the seamless development of R & D to mass production.
'The success of this pass marks China's entry into a completely new phase of rapid development in the R & D and industrialization of MEMS and advanced sensors. The test line in the future will continue to exert strength in new materials, new processes, new devices, new System research and development of key areas of technology to further promote the 'beyond the mole' of the perfect industrial chain and the development of innovative applications for the Internet. '' Shanghai Micro Technology Research Institute President Yang Xiao said.
With the world's leading 8-inch Moore R & D Pilot Line as its fulcrum, ITRI will continue to build an integrated functional platform integrating R & D, engineering, marketing and incubation to provide a full range of services and solutions for innovative enterprises and partners Program, building a science and technology innovation center with global influence and "surpassing Moore" industrial cluster.