"SuperSizer" technology, also known as "New Generation Solution Particle Monitor" presented by ITRI at SEMICON Taiwan in September this year
The technology called "SuperSizer", the "New Generation Solution Particle Monitor" presented by ITRI at SEMICON Taiwan this year, uses airborne particle measurement technology in solution The monitoring of nano-particles breaks through the detection limit of 40 nm in the prior art, and can continuously monitor the particle size and concentration of solution in the range of 3 nm-1000 nm on-line.
This device not only shortlisted R & D Award R & D 100, and has received TSMC orders.