As the world's leading process control specialist, KLA-Tencor has support for the entire semiconductor manufacturing process, said Mark Shirey, VP of Customer Engagement at KLA-Tencor. "KLA-Tencor has complete inspection and measurement products that help customers Addressing different applications and challenges in different markets, such as the mobile device market, often requires devices with low power consumption, high reliability, and faster time to market that allows no errors to occur in the production process that would otherwise result in product yield Low or delay time to market. '
Process complexity continues to improve, yield control in the entire process is very crucial
For advanced processes such as design nodes such as 7nm and 5nm, it is becoming increasingly difficult for chipmakers to find stack-to-edge errors in product stacks, uneven linewidth sizes, and a clear cause of Hotspots, , KLA-Tencor recently introduced five patterning control systems targeted at logic and cutting-edge memory design node designs up to 7nm to help chipmakers meet the stringent process latitude required for multiple exposure and EUV lithography.
According to Jichang.com, the five products are the ATL Stacking Projection System and the SpectraFilm ™ F1 Film Measurement System, respectively. They provide process characterization analysis and offset for the fabrication of FinFET, DRAM, 3D NAND and other complex device structures Monitoring; the Teron ™ 640e Mask Detection product family and the LMS IPRO7 Mask Stack alignment measurement system assist the mask manufacturer in developing and certifying EUV and advanced optical masks; in addition, the 5D Analyzer® X1 Advanced Data Analysis System provides open The foundation of the architecture to support the fab's tailor-made analysis and real-time process control applications.
It can be said that KLA-Tencor's product line covers all aspects of the semiconductor manufacturing process and technology nodes. Mark Shirey said: 'These five systems will provide our customers KLA-Tencor cutting-edge technology to help them reduce the crystal The error of patterning caused by circles, masks, and process steps can be controlled from the source of the process to detect errors early to avoid greater loss.
KLA-Tencor continues to increase its investment in China and has launched its Chinese website
With the Chinese government's vigorous investment in developing the semiconductor industry in recent years, the semiconductor industry in China has shown a thriving situation, and many international companies are gradually realizing the importance of the Chinese market and investing in the Chinese market. KLA-Tencor is no exception, But also continue to increase its investment in China.At present, KLA-Tencor has set up 10 offices in China and recently expanded its Beijing office to quickly and timely respond to the needs of local customers and solve their technical problems .
It is noteworthy that KLA-Tencor also recently launched its Chinese website (www.kla-tencor.cn), which will synchronize KLA-Tencor's US website and regularly update various new features and technical information to better Customer service in China.
Zhang Zhi'an, president of KLA-Tencor China, said: "With the accelerated development of China's semiconductor market, its position has become pivotal and will be a battleground for military strategists." China has many customers who are important to us and we want to be They maintain close cooperation and provide them with the necessary technical support and services. From now on, we will continue to invest in the Chinese market. "He cited an example, such as advanced process technology FD SOI, is unique to China and has landed, KLA -Tencor also offers a full range of technical support.
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