Negative temperature coefficient thermistor is a common temperature measurement and control components, with temperature measurement accuracy, high sensitivity, good reliability, low cost, long working life and other characteristics, widely used in aviation, marine and civil fields. With the electronics industry And the continuous improvement of information technology, modern electronic information systems are moving in the direction of miniaturization and monolithic integration.Compared with bulk ceramic thermistors, thin-film NTC thermistors are more likely to miniaturize temperature sensors and integrate The goal of the semiconductor, integrated circuits, micro-nano devices and other fields have broad application prospects.
Chinese Academy of Sciences, Xinjiang Institute of Physical and Chemical Materials Physics and Chemistry Chang Aimin research team dedicated to thin-film NTC thermistor materials and components research and development. Has adopted the laser molecular beam epitaxy, laser pulse deposition technology, chemical solution deposition technology Out of the NTC thermistor film with a good preferential orientation.In order to further realize the device of the thin film material, after comparing the advantages and disadvantages of various thin film preparation techniques, the team selected the magnetron sputtering method to prepare the NTC thermistor with a stable negative temperature Coefficient of thermal properties of thin film materials.
The results show that the electronic transition frequency, the temperature coefficient of resistance and the characteristic temperature of Mn-Co-Ni-based NTC thermistors prepared by magnetron sputtering are related to the film thickness.The results of Hall effect test show that when the thickness is less than 693nm, The values of 1 / v0 and αT = 303K increase with the increase of the thickness, and the thicknesses of 1 / v0 and αT = 303K decrease with the increase of the thickness when the thickness is greater than 693nm.The experimental results show that when the film thickness is in the range of 265- At 693nm, the proportion of Mn3 + / Mn4 + in the film decreases significantly, while the ratio of Mn3 + / Mn4 + increases as the film thickness continues to increase to 693-887nm.The proportion of Mn3 + / Mn4 + directly affects the characteristic temperature of the material, Affects the sensitivity of the thermosensitive film material to temperature changes.The results of the study are published in Applied Surface Science.
This work lays a theoretical foundation for the key R & D project of the Xinjiang Physical and Chemical Research Institute, which is based on the research of bonding temperature measurement thermocouple sensor technology .Related research work has been supported by Young Scientists of China Association for Science and Technology Class B projects and other funding.
