Figure: silicon in the 'refining' into the finished wafer 100 to 200 processes, not dust, otherwise it may come to naught. Source: Eastern IC
A product, from the laboratory to the factory, the most difficult way to go is a pilot.For high cost of low output or even no output, for many of the forefront of the laboratory technology, the trial period is like a light can not see the dark Channel, no profit and market to maintain the reporter yesterday came to Jiading Industrial Zone in the north of China's first 'beyond Moore' pilot line, visit this determined to break through our semiconductor industry 'pilot blind spot' R & D innovation platform.
Ultra clean 'floating' plant
Put on anti-static clean clothes, shoes, gloves, masks, after the wind room will be all the dust blowing all the body ... ... every day, Shanghai Micro Technology Industry Research Institute of MEMS technology engineering director Xu Yuanjun and his colleagues, are Dressed himself as an ultra clean 'white penguin' to enter the 8-inch 'beyond Moore' R & D pilot line, nearly 5000 square meters of ten clean room, requiring one minute per cubic foot of space, more than 0.2 micron micro Dust less than 10! Super clean room a total of four areas, namely the lithography area, film area, etching area and diffusion area. Wafer in the 'refining' into a wafer of 100 to 200 processes, not Contaminated dust, or may come to naught.
To this end, the entire plant design costs to consider - 8.8 meters on the second floor is divided into three layers, the entire 'pilot line' of the main equipment seems to 'floating' in the middle layer - invisible upper and lower layers, In addition to laying the supply of gas and chemicals piping, but also filled with 'cleaning' air facilities.
'8-inch' production line leading international
This kind of excellence, only for our country in the 'beyond the Moore' field really make a result. Shanghai Micro Technology Industry Research Institute 8-inch research and development pilot line director, vice president of operations tour Jiajie pointed to sparkling silicon, familiar: Inch diameter of up to 20 cm, the distribution of hundreds to tens of thousands of ranging from the components. 'To know that in the' beyond Moore 'field, the industry is also commonly used 6-inch production line, Shanghai pilot line is bright The international leader but few people interested in the '8 inches'.
In this new test line, every one 'beyond Moore' people have a belief in the heart: festive nineteenth, China's scientific innovation must be 'run' to 'lead', cutting-edge technology in the pilot program to Dare to first
Through the years of theoretical research and technical verification, the practical application and production platform are seriously out of line, which originated from the microelectromechanical system product research and development involves a long chain of technology, its 'non-standard' characteristics make R & D innovation And the match between the production is not high, the need for a long run-in period.
Through research and development to test 'closed loop'
Last month, as one of the important nodes in the construction of the 'four pillars' of Shanghai Science and Technology Center, China's first 8-inch pilot line for microelectromechanical systems was the first in the field of 'beyond Moore' in China. In the domestic semiconductor industry, Field is not a small 'innovation earthquake' - from the early research and development to the late test 'closed loop' is expected to be through.
A month, 'over the Moore' pilot line on the brightly lit, the positions of scientific and technical personnel with practical action to meet the nineteenth held: the end of this month is about to complete the first batch of product temperature sensor tension. Once successful, this Monthly production of 3000 wafer pilot line, for many of the laboratory in the cutting-edge sensor technology, laying a market to the 'brilliant road'.